Loadlock Chamber
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작성자 관리자 작성일19-05-27 17:28 조회431회 댓글0건관련링크
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• Characteristic and advantage
- N2 Available in Low-vacuum and high-vacuum
• Range of application
- N2 Process, Low/High Vac Process
• Main function
- Glass and mask transfer via Bottom Lid Up/Down
- Vacuum Pumping, Vent for Chamber vacuum control
- Pressure Detection through vacuum gauge