Mask Stock Chamber
페이지 정보
작성자 관리자 작성일19-05-28 11:08 조회402회 댓글0건관련링크
본문
• Characteristic and advantage
- Load cassetter type with vacuum chamber structure
• Range of application
- N2 Process, Low/High Vac Process
• Main function
- Vacuum pumping, vant to control vacuum in chamber
- Loading the mask via cassette up/down
- Pressure detection thruogh vacuum gauge