OLED 1 페이지

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  TM CHAMBER

   

  ITEM	SPECIFICATION
  Glass Size	Gen2.0 ~ Gen8.5
  Pass Line	TBD
  Base Pressure	7.42E-7 Torr
  Leak Rate	≤ 0.1mTorr/min(10min)
  Pump	DRY Pump + Cryo Pump
  Up/Down	SUS Ball Screw + Lm Guide
  Chamber Material	SUS304(EP)

   

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  L/L CHAMBER (Load Lock)

   

  ITEM	SPECIFICATION
  Glass Size	Gen2.0 ~ Gen8.5
  Pass Line	TBD
  Base Pressure	7.42E-7 Torr
  Leak Rate	≤ 0.1mTorr/min(10min)
  Tact Time	90sec
  Pump	DRY Pump + Cryo Pump
  Up/Down	SUS Ball Screw + LM Guide
  Chamber Material	SUS304(EP)

   

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  PASSAGE CHAMBER

   

  ITEM	SPECIFICATION
  Glass Size	Gen2.0 ~ Gen8.5
  Pass Line	TBD
  Base Pressure	7.42E-7 Torr
  Leak Rate	≤ 0.1mTorr/min(10min)
  Pump	DRY Pump + Cryo Pump
  Up/Down	SUS Ball Screw + Lm Guide
  Chamber Material	SUS304(EP)

   

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  MASK STOCK/ BUFFER CHAMBER

   

  ITEM	SPECIFICATION
  Glass Size	Gen2.0 ~ Gen8.5
  Pass Line	TBD
  Base Pressure	7.42E-7 Torr
  Leak Rate	≤ 0.1mTorr/min(10min)
  Tact Time	90sec
  Pump	DRY Pump + Cryo Pump
  Up/Down	SUS Ball Screw + Lm Guide
  Chamber Material	SUS304(EP)

   

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  FLIP CHAMBER

   

  ITEM	SPECIFICATION
  Base Pressure	7.42E-7 Torr
  Leak Rate	≤ 0.1mTorr/min(10min)
  Tact Time	90sec
  Pump	DRY Pump + Cryo Pump
  Drive	Z-axis Moving, Flip

   

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  TM CHAMBER

   

  ITEM	SPECIFICATION
  Glass Size	TBD
  Base Pressure	≤0.05Vol%h
  Leak Rate	ISO 10648-2 Class 1
  O2 ans H2O Level	After Purifier Run H2O≤1ppm,O2≤1ppm
  Laminar Flow System	Shinsung or Equivalent EFU Filter system
  Chamber Material	SUS304+UV Cut Film(anti electrostatic) PVC

   

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  PASSAGE CHAMBER

  ITEM	SPECIFICATION
  Glass Size	TBD
  Base Pressure	≤0.05Vol%h
  Leak Rate	ISO 10648-2 Class 1
  O2 ans H2O Level	After Purifier Run H2O≤1ppm,O2≤1ppm
  Laminar Flow System	None
  Chamber Material	SUS304+UV Cut Film(anti electrostatic) PVC

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  BUFFER CHAMBER

  ITEM	SPECIFICATION
  Base Pressure	≤0.05Vol%h
  Leak Rate	ISO 10648-2 Class 1
  O2 ans H2O Level	After Purifier Run H2O≤1ppm,O2≤1ppm
  Laminar Flow System	Slide Flow
  Robot	DUAL ARM ROBOT

  
  

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  USC CHAMBER

   

  ITEM	SPECIFICATION
  Glass Size	TBD
  Base Pressure	≤0.05Vol%h
  Leak Rate	ISO 10648-2 Class 1
  O2 ans H2O Level	After Purifier Run H2O≤1ppm,O2≤1ppm
  Laminar Flow System	None
  Chamber Material	SUS304+UV Cut Film(anti electrostatic) PVC

   

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  WET CLEANER(OLED_LCD)

   

  ITEM	SPECIFICATION
  Model	Gen2.0 ~ Gen10.5
  Tact Time	TBD
  Interface	Conveyor To Conveyor Robot interface
  Cleaning Module	Roll Brush / Mixing Jet HPMJ / Slit Jet / Air Knife
  Process	PLC System

   

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  CHEMICAL WET SYSTEM

   

  ITEM	SPECIFICATION
  Model	Gen2.0 ~ Gen8.5
  Interface	Conveyor / Robot
  Control	PLC System

   

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  PRE LLO CLEANER

   

  ITEM	SPECIFICATION
  Model	Gen4.5 ~ Gen8 Half
  Tact Time	T/Time 50 sec Under
  Panel In/Out	Conveyor Type + Stage Type
  Module	Lower PVA Brush / Special Air Curtain None Contact Reverse Unit
  Control	PLC System

   

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  ROLLABLE TV CLEANER

  ITEM	SPECIFICATION
  Substrate	Thin Glass(0.05 ~0.1T) Flexible Glass
  Model	65” ~ 88”
  Tact Time	T/Time 65” 200 sec
  Panel In/Out	Vacuum Stage + Conveyor Type
  Pass Line	1,500 mm
  Module	Disk Brush + Roll Brush_Air Knife
  Process	PLC System

   

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  FSPM CLEANER

   

  ITEM	SPECIFICATION
  Substrate	Metal Film / Thin (Flexible) Film
  Model	65” ~ 88”
  Panel In/Out	Vacuum Stage + Conveyor Type
  Pass Line	1,500 mm
  Module	Wiper Clean Module
  Process	PLC System

   

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  BEFORE POLARIZATION CLEANER

  ITEM	SPECIFICATION
  Model	43” ~ 75” / 50 ~ 85” / ~ 120 “
  Tact Time	T/Time 65” 13sec, 75” 18sec
  Interface	Conveyor / Robot
  Module	Polish Belt , Roll Brush , Air Knife
  Control	PLC System