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LCD/OLED 1 페이지

LCD/OLED

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  • TM CHAMBER

     

    ITEM

    SPECIFICATION

    Glass Size

    Gen2.0 ~ Gen8.5

    Pass Line

    TBD

    Base Pressure

    7.42E-7 Torr

    Leak Rate

    ≤ 0.1mTorr/min(10min)

    Pump

    DRY Pump + Cryo Pump

    Up/Down

    SUS Ball Screw + Lm Guide

    Chamber Material

    SUS304(EP)

     

  • L/L CHAMBER (Load Lock)

     

    ITEM

    SPECIFICATION

    Glass Size

    Gen2.0 ~ Gen8.5

    Pass Line

    TBD

    Base Pressure

    7.42E-7 Torr

    Leak Rate

    ≤ 0.1mTorr/min(10min)

    Tact Time

    90sec

    Pump

    DRY Pump + Cryo Pump

    Up/Down

    SUS Ball Screw + LM Guide

    Chamber Material

    SUS304(EP)

     

  • PASSAGE CHAMBER

     

    ITEM

    SPECIFICATION

    Glass Size

    Gen2.0 ~ Gen8.5

    Pass Line

    TBD

    Base Pressure

    7.42E-7 Torr

    Leak Rate

    ≤ 0.1mTorr/min(10min)

    Pump

    DRY Pump + Cryo Pump

    Up/Down

    SUS Ball Screw + Lm Guide

    Chamber Material

    SUS304(EP)

     

  • MASK STOCK/ BUFFER CHAMBER

     

    ITEM

    SPECIFICATION

    Glass Size

    Gen2.0 ~ Gen8.5

    Pass Line

    TBD

    Base Pressure

    7.42E-7 Torr

    Leak Rate

    ≤ 0.1mTorr/min(10min)

    Tact Time

    90sec

    Pump

    DRY Pump + Cryo Pump

    Up/Down

    SUS Ball Screw + Lm Guide

    Chamber Material

    SUS304(EP)

     

  • FLIP CHAMBER

     

    ITEM

    SPECIFICATION

    Base Pressure

    7.42E-7 Torr

    Leak Rate

    ≤ 0.1mTorr/min(10min)

    Tact Time

    90sec

    Pump

    DRY Pump + Cryo Pump

    Drive

    Z-axis Moving, Flip

     

  • TM CHAMBER

     

    ITEM

    SPECIFICATION

    Glass Size

    TBD

    Base Pressure

    ≤0.05Vol%h

    Leak Rate

    ISO 10648-2 Class 1

    O2 ans H2O Level

    After Purifier Run H2O≤1ppm,O2≤1ppm

    Laminar Flow System

    Shinsung or Equivalent EFU Filter

    system

    Chamber Material

    SUS304+UV Cut Film(anti electrostatic)

    PVC

     

  • PASSAGE CHAMBER

    ITEM

    SPECIFICATION

    Glass Size

    TBD

    Base Pressure

    ≤0.05Vol%h

    Leak Rate

    ISO 10648-2 Class 1

    O2 ans H2O Level

    After Purifier Run H2O≤1ppm,O2≤1ppm

    Laminar Flow System

    None

    Chamber Material

    SUS304+UV Cut Film(anti electrostatic) PVC

  • BUFFER CHAMBER

    ITEM

    SPECIFICATION

    Base Pressure

    ≤0.05Vol%h

    Leak Rate

    ISO 10648-2 Class 1

    O2 ans H2O Level

    After Purifier Run H2O≤1ppm,O2≤1ppm

    Laminar Flow System

    Slide Flow

    Robot

    DUAL ARM ROBOT


  • USC CHAMBER

     

    ITEM

    SPECIFICATION

    Glass Size

    TBD

    Base Pressure

    ≤0.05Vol%h

    Leak Rate

    ISO 10648-2 Class 1

    O2 ans H2O Level

    After Purifier Run H2O≤1ppm,O2≤1ppm

    Laminar Flow System

    None

    Chamber Material

    SUS304+UV Cut Film(anti electrostatic) PVC

     

  • WET CLEANER(OLED_LCD)

     

    ITEM

    SPECIFICATION

    Model

    Gen2.0 ~ Gen10.5

    Tact Time

    TBD

    Interface

    Conveyor To Conveyor

    Robot interface

    Cleaning Module

    Roll Brush / Mixing Jet

    HPMJ / Slit Jet / Air Knife

    Process

    PLC System

     

  • CHEMICAL WET SYSTEM

     

    ITEM

    SPECIFICATION

    Model

    Gen2.0 ~ Gen8.5

    Interface

    Conveyor / Robot

    Control

    PLC System

     

  • PRE LLO CLEANER

     

    ITEM

    SPECIFICATION

    Model

    Gen4.5 ~ Gen8 Half

    Tact Time

    T/Time 50 sec Under

    Panel In/Out

    Conveyor Type + Stage Type

    Module

    Lower PVA Brush / Special Air Curtain

    None Contact Reverse Unit

    Control

    PLC System

     

  • ROLLABLE TV CLEANER

    ITEM

    SPECIFICATION

    Substrate

    Thin Glass(0.05 ~0.1T)

    Flexible Glass

    Model

    65” ~ 88”

    Tact Time

    T/Time 65” 200 sec

    Panel In/Out

    Vacuum Stage + Conveyor Type

    Pass Line

    1,500 mm

    Module

    Disk Brush + Roll Brush_Air Knife

    Process

    PLC System

     

  • FSPM CLEANER

     

    ITEM

    SPECIFICATION

    Substrate

    Metal Film / Thin (Flexible) Film

    Model

    65” ~ 88”

    Panel In/Out

    Vacuum Stage + Conveyor Type

    Pass Line

    1,500 mm

    Module

    Wiper Clean Module

    Process

    PLC System

     

  • BEFORE POLARIZATION CLEANER

    ITEM

    SPECIFICATION

    Model

    43” ~ 75” / 50 ~ 85” / ~ 120 “

    Tact Time

    T/Time 65” 13sec, 75” 18sec

    Interface

    Conveyor / Robot

    Module

    Polish Belt , Roll Brush , Air Knife

    Control

    PLC System

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