나인테크

LCD/OLED 1 페이지

LCD/OLED

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  • TM CHAMBER

     

    ITEM

    SPECIFICATION

    Glass Size

    Gen2.0 ~ Gen8.5

    Pass Line

    TBD

    Base Pressure

    7.42E-7 Torr

    Leak Rate

    ≤ 0.1mTorr/min(10min)

    Pump

    DRY Pump + Cryo Pump

    Up/Down

    SUS Ball Screw + Lm Guide

    Chamber Material

    SUS304(EP)

     

  • L/L CHAMBER (Load Lock)

     

    ITEM

    SPECIFICATION

    Glass Size

    Gen2.0 ~ Gen8.5

    Pass Line

    TBD

    Base Pressure

    7.42E-7 Torr

    Leak Rate

    ≤ 0.1mTorr/min(10min)

    Tact Time

    90sec

    Pump

    DRY Pump + Cryo Pump

    Up/Down

    SUS Ball Screw + LM Guide

    Chamber Material

    SUS304(EP)

     

  • PASSAGE CHAMBER

     

    ITEM

    SPECIFICATION

    Glass Size

    Gen2.0 ~ Gen8.5

    Pass Line

    TBD

    Base Pressure

    7.42E-7 Torr

    Leak Rate

    ≤ 0.1mTorr/min(10min)

    Pump

    DRY Pump + Cryo Pump

    Up/Down

    SUS Ball Screw + Lm Guide

    Chamber Material

    SUS304(EP)

     

  • MASK STOCK/ BUFFER CHAMBER

     

    ITEM

    SPECIFICATION

    Glass Size

    Gen2.0 ~ Gen8.5

    Pass Line

    TBD

    Base Pressure

    7.42E-7 Torr

    Leak Rate

    ≤ 0.1mTorr/min(10min)

    Tact Time

    90sec

    Pump

    DRY Pump + Cryo Pump

    Up/Down

    SUS Ball Screw + Lm Guide

    Chamber Material

    SUS304(EP)

     

  • FLIP CHAMBER

     

    ITEM

    SPECIFICATION

    Base Pressure

    7.42E-7 Torr

    Leak Rate

    ≤ 0.1mTorr/min(10min)

    Tact Time

    90sec

    Pump

    DRY Pump + Cryo Pump

    Drive

    Z-axis Moving, Flip

     

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