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  TM CHAMBER

   

  ITEM	SPECIFICATION
  Glass Size	TBD
  Base Pressure	≤0.05Vol%h
  Leak Rate	ISO 10648-2 Class 1
  O2 ans H2O Level	After Purifier Run H2O≤1ppm,O2≤1ppm
  Laminar Flow System	Shinsung or Equivalent EFU Filter system
  Chamber Material	SUS304+UV Cut Film(anti electrostatic) PVC

   

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  PASSAGE CHAMBER

  ITEM	SPECIFICATION
  Glass Size	TBD
  Base Pressure	≤0.05Vol%h
  Leak Rate	ISO 10648-2 Class 1
  O2 ans H2O Level	After Purifier Run H2O≤1ppm,O2≤1ppm
  Laminar Flow System	None
  Chamber Material	SUS304+UV Cut Film(anti electrostatic) PVC

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  BUFFER CHAMBER

  ITEM	SPECIFICATION
  Base Pressure	≤0.05Vol%h
  Leak Rate	ISO 10648-2 Class 1
  O2 ans H2O Level	After Purifier Run H2O≤1ppm,O2≤1ppm
  Laminar Flow System	Slide Flow
  Robot	DUAL ARM ROBOT

  
  

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  USC CHAMBER

   

  ITEM	SPECIFICATION
  Glass Size	TBD
  Base Pressure	≤0.05Vol%h
  Leak Rate	ISO 10648-2 Class 1
  O2 ans H2O Level	After Purifier Run H2O≤1ppm,O2≤1ppm
  Laminar Flow System	None
  Chamber Material	SUS304+UV Cut Film(anti electrostatic) PVC